Time-of-Flight Secondary Ion Mass Spectrometry (ToF-SIMS) is a surface sensitive technique able to obtain both elemental composition and molecular information on a surface and in-depth. ToF-SIMS has the potential to provide detailed insight into the 3D chemical composition.
Stylus profilometry brings a stylus tip into direct contact with a surface sample in order to trace the topography of the surface by line scanning the region(s) of interest. This technique is often used to measure a surface’s profile, in order to quantify its roughness. The main uses are the measurement of step heights and of feature sizes for samples, which have etched patterns on them. Critical dimensions as curvature or flatness are also computed from the surface topography.
